Study of Thermal Effect in the Interaction of Nanosecond Capillary Discharge Extreme Ultraviolet Laser with Copper

Study of Thermal Effect in the Interaction of Nanosecond Capillary Discharge Extreme Ultraviolet Laser with Copper

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Interaction of Extreme Ultraviolet (EUV) laser with matters is an attractive subject since novel phenomena always occur under the effect of high energy photons.In this paper, the thermal effect involved in the interaction of a capillary Metal Card Holder discharge 46.9 nm laser with copper was studied theoretically and experimentally.The temperature variation of the laser-irradiated region of copper was calculated.According to the results, the copper surface was ablated obviously and presented the trace Brooms of melting, evaporation, and resolidification, which suggested the thermal effect occurred on the surface during the laser irradiation.